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Photolithography Related Publications (7)

869. Saul Lee, Jeffrey Byers, Kane Jen, Paul Zimmerman, Bryan Rice, Nicholas J. Turro, and C. Grant Willson, "An analysis of double exposure lithography options", Proc. of SPIE, 6924, 69242A-1 (2008). PDF

870. Naphtali A. O'Connor, Adam J. Berro, Jeffrey R. Lancaster, Xinyu Gu, Steffen Jockusch, Tomoki Nagai, Toshiyuki Ogata, Saul Lee, Paul Zimmerman, C. Grant Willson, and Nicholas J. Turro, "Toward the Design of a Sequential Two Photon Photoacid Generator for Double Exposure Photolithography", Chem. Mater., 20, 7374-7376 (2008). PDF

878. S. Lee, K. Jen, C. G. Willson, J. Byers, Paul Zimmerman, N. J. Turro, "Materials modeling and development for use in double-exposure lithography applications", J. Micro/Nanolith. MEMS MOEMS, 8, 011011 (2009). PDF

891. Xinyu Gu, Adam J. Berro, Younjin Cho, Kane Jen, Saul Lee, Tomoki Nagai, Toshiyuki Ogata, William J. Durand, Arunkumar Sundaresan, Jeffrey R. Lancaster, Steffen Jockusch, Paul Zimmerman, Nicholas J. Turro and C. Grant Willson, "Fundamental Study of Optical Threshold Layer Approach Towards Double Exposure Lithography", Proc. of SPIE, 7273, 72731-C (2009). PDF

896. Adam J. Berro, Xinyu Gu, Naphtali O'Connor, Steffen Jockusch, Tomoki Nagai, Toshiyuki Ogata, Paul Zimmerman, Bryan J. Rice, Elizabeth Adolph, Travis Byargeon, Jose Gonzalez, Nicolas J. Turro, C. Grant Willson, "Optical Threshold Layer and Intermediate State Two-Photon PAG Approaches to Double Exposure Lithography", Proc. of SPIE, 7273, 72731-B (2009). PDF

905. Xinyu Gu, Christopher Bates, Younjin Cho, Elizabeth Costner, Fernando Marzuka, Tomoki Nagai, Toshiyuki Ogata, Chuan Shi, Arun K. Sundaresan, Nicholas J. Turro, Robert Bristol, Paul Zimmerman and C. Grant Wilson, "A New Materials-based Pitch Division Technique", J. Photopolym. Sci. Tech., 22, 773-781 (2009). PDF

914. Arun Kumar Sundaresan, Steffen Jockusch, Yongjun Li, Jeffrey R. Lancaster, Steven Banik, Paul Zimmerman, James M. Blackwell, Robert Bristol and Nicholas J. Turro, "Adiabatic ring opening in tethered naphthalene and anthracene cycloadducts", Photochem. Photobiol. Sci., 9, 1082-1084 (2010). PDF